In order to meet the future requirements of micro and nanotechnology, we now also offer so-called "grating structures". These are periodic nanostructures on a wafer scale.

These optical gratings are used in a wide variety of applications, such as:

  • extensive and coherent masters for nanoimprint lithography
  • Nanostructures for automatic adjustment of electron beam lithography or electron beam microscopy systems
  • Coupling structures for the efficient coupling and decoupling of optical radiation
  • Grating waveguide structures for high-reflection pulse compression gratings (hPC)
  • Diffraction gratings for spectroscopic applications

If you need assistance please do not hesitate to contact us! We will be pleased to advise you by phone at + 49-(0)241/943 297-00 or by e-mail.

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Grating Gratings Grating Structures
Grating Gratings Grating Structures
Grating Gratings Grating Structures

Typical Specifications:

Grating type:
Lines and Spaces, Holes and Pillars in rectangular and hexagonal lattice

50.8 mm, 76.2 mm, 100 mm, 150mm, 200mm (auf Anfrage)

Silizium, Glas, Quarz, …

400nm to 1000nm entire area

Structure Size:
50nm – 600nm typical

etching depth:
20nm – 500nm typical